Cita APA (7th ed.)

Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication. McGraw Hill.

Cita Chicago (17th ed.)

Middleman, Stanley, i Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. Nueva York: McGraw Hill, 1993.

Cita MLA (9th ed.)

Middleman, Stanley, i Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. McGraw Hill, 1993.