Nano -and micro- electromechanical systems: fundamentals of nano- and microengineering
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| Main Author: | Lyshevski, Sergey Edward (autor) |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Ratón
CRC
2005
|
| Edition: | 2a. ed |
| Series: | Nano- and Microscience, Engineering, Technology, and Medicine Series
|
| Subjects: | |
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