Nano -and micro- electromechanical systems: fundamentals of nano- and microengineering
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| 主要作者: | |
|---|---|
| 格式: | 圖書 |
| 語言: | 英语 |
| 出版: |
Boca Ratón
CRC
2005
|
| 版: | 2a. ed |
| 叢編: | Nano- and Microscience, Engineering, Technology, and Medicine Series
|
| 主題: | |
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